Compact Nanopositioner Stages
For cost-sensitive applications
Why Use Nanopositioners / Nanopositioning Systems?
A nanopositioner is a highly precise motion device, linear or rotary, capable of positioning samples with nanometer or sub-nanometer accuracy. Piezo flexure-guided nanopositioners provide the highest precision, minimized dimensions and high speed.
Linear motor driven nanopositioners are also available, with air bearings leading in terms of precision and geometric performance.
PI has decades of experience in nanopositioner design and manufacture, with global R&D and manufacturing resources for standard and custom nanopositioning systems and piezo stages.
Examples of Piezo Positioners and Nanopositioners
Nanopositioners for Microscopy
Piezo stages with clear aperture
Multi-Axis Nanopositioners
Parallel kinematics and metrology
PInano™ Z Nanopositioners
For super-resolution microscopy
Closed-Loop Single-Axis Nanopositioners
Piezo stages with direct metrology
Objective Nanopositioners
Fast nanofocusing for microscopy
6-Axis Nanopositioners
Parallel piezo stage systems
PInano XY/Z Nanopositioners
For super-resolution microscopy
Low-Cost Miniature Piezo Stages
Compact stages with aperture
Z and Tip/Tilt Stages
Angular and axial nanopositioning
Custom Piezo Stage Systems
Standard and custom nanopositioning
Motorized Microscope Stages
Open-frame, long-range sample positioning
Ultra-Low-Inertia Nanopositioners and Precision Position Sensors
An ultra-low-inertia solid-state PZT nanopositioner stage can repeatedly move bidirectional nanometer-level steps at up to hundreds of Hz, when required.
PI offers a large variety of custom and standard ultra-low-inertia nanopositioner systems. Capacitance sensors are the nanometrology system of choice for the highest precision nanopositioner designs, providing direct, non-contact metrology at sub-nanometer levels.
Flexure Design: Eliminates Friction and Improves Guiding Accuracy
Flexure motion is based on the elastic deformation of a solid material. Friction and stiction are eliminated, while flexures provide high stiffness, load capacity and resistance to shock and vibration. They are maintenance free, wear free, vacuum compatible and do not require lubricants or compressed air.
PI multi-axis nanopositioner systems are based on FEA-calculated, wire-EDM-cut, parallel-kinematics flexure designs. These multilink flexure guiding systems eliminate cosine errors and provide bidirectional flatness and straightness in the nanometer or microradian range.
Wire-EDM cutting provides high-accuracy flexure guiding systems.
PICMA® piezo actuators use co-fired ceramic encapsulation for high performance and long lifetime.
Active Trajectory Control
Active trajectory control is available on single-module parallel-metrology nanopositioning systems. It can improve straightness and flatness to sub-nanometer precision. Digital controllers with coordinate transformation algorithms allow active trajectory control for up to 6 degrees of freedom.
DDL Improves Scanning Linearity up to 1000-Fold
Conventional controller: the outer curve is the target position, the inner curve shows actual motion.
With Dynamic Digital Linearization, tracking error is reduced to a few nanometers.
Preshaping algorithms and Dynamic Digital Linearization can increase dynamic linearity and effective bandwidth of high-speed nanopositioner systems by up to three orders of magnitude. This improves dynamic accuracy and throughput.
DDL, available for PI digital controllers, reduces phase lag and tracking error in dynamic applications to virtually indiscernible levels. It works in single-axis and multi-axis applications.
Mach™ Throughput Processor
Vibration Elimination
The example shows ringing of a poorly damped component on a high-speed nanopositioner stage.
The Mach™ Throughput Processor™ eliminates resonant ringing, allowing rapid motion without a settling phase. It also reduces resonances excited in neighboring components outside the piezo nanopositioner system's servo loop.
- The actuated load and fixturing
- The supporting structure
- Other components attached to the support structure
Parallel Kinematics Piezo-Driven Nanopositioning Systems
Serial Kinematics vs. Parallel Kinematics in Piezo Nanopositioner Stages
Stacked Serial Kinematics
- Simple design, but slower response
- Non-symmetric resonant frequencies
- Mounting-angle-dependent orthogonality error
- Runout cannot be monitored across axes
Nested Serial Kinematics
- Thinner and better response than stacked serial kinematics
- No major additional metrology advantages
Parallel Kinematics / Metrology
- Same ultra-low inertia for X and Y motion
- Excellent orthogonality
- Parallel metrology for reduced runout
- Additional theta-Z axis possible
Nanopositioner Selection Guide
| Nanopositioner Selection Guide |
 Jump to Introduction to Piezo Transducers and Nanopositioning-Actuators |
| Compact Piezo Stages Without Sensors |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-713 | Compact Nanopositioner, XY-scanner stage, fast. | XY | 15 | - |
| P-603 | Piezo Flexure Nanopositioning Actuator . | X | 100, 300, 500 | - |
| P-290 | Piezo-Z nanopositiner stage. Long travel range | Z | 1000 | SGS |
| P-601 | Z-axis nanopositioner PZT stage, long travel range. |
Z, θx | 480 | SGS |
| Objective Nanofocusing Systems / Z-Stages |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-725 | PIFOC. objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology. |
Z | 100, 250, 400 | Capacitive |
| P-721.CDQ P-721.LLQ |
PIFOC. objective nanofocusing system, very fast and accurate, with QuickLock mounting system, direct metrology. |
Z | 100 | Capacitive / LVDT |
| PIFOC Nano-Focuser | PIFOC. objective nanofocusing stages, fast, compact |
Z | to 7000 | - |
| P-541.Z | Low-profile Z-stage, 80 x 80 mm aperture. | Z | 100 | Capacitive / SGS |
| Closed-Loop 1- and 2-Axis Stages with Strain Gauge Sensors |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-611.1, P-611.2 |
Compact, low-cost X and XY nanopositioner stages. | X, XY | 100 | SGS |
| P-611.ZS, P-611.XZS |
Compact, low-cost X and XY nanopositioner stages. | Z, XZ | 100 | SGS |
| Closed-Loop Single-Axis Stages with Direct Metrology Sensors (Direct metrology provides increased accuracy) |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-622.Z - P-622.Z |
PIHera Z-axis nanopositioners, compact, very accurate, long travel range. |
Z | 50, 100, 250 | Capacitive |
| P-772 | Nanopositioner stage, very compact, fast and accurate | X | 10 | Capacitive |
| P-630 | Piezo Nanopositioner Stage, compact, fast, direct drive, aperture | X | 80 | Capacitive |
| P-750 | High-load Piezo Nanopositioner Stage, very good guidance, high stiffness. |
X | 75 | Capacitive / LVDT |
| P-752 | Piezo Nanopositioner Stage. Very fast and accurate, outstanding guiding accuracy. |
X | 15, 30 | Capacitive |
| P-753 | Piezo Nanopositioner Stage and actuator in one, very compact, fast and accurate. |
Z & X | 12, 25, 38 | Capacitive |
| P-620.1 - P-625.1 |
PIHera piezo nanopositioners, compact, very accurate, long travel ranges, excellent value |
X (XY, Z) | 50, 100, 250, 500 | Capacitive |
| Multi-Axis Stages, Modular Stages (Serial Kinematics) |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-612 | Compact, low-cost, XY stage. 100 x 100 m travel, clear aperture. |
XY | 100 x 100 | SGS |
| P-611.3 | NanoCube XYZ piezo alignment system, compact, very cost-effective. |
XYZ | 100 | SGS |
| P-620.2 - P-625.2 |
PIHera XY piezo nanopositioners, Very compact & accurate (direct metrology), long travel range. |
XY (Z, XYZ) | 50, 100, 250, 500 | Capacitive |
| Multi-Axis Stages, Parallel Kinematics / Parallel Metrology (Parallel kinematics and parallel metrology allow active trajectory control, better dynamics and higher multi-axis precision) |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-615 | NanoCube 350C XYZ piezo alignment system, clear aperture, ideal for fiber alignment. |
XYZ | to 350 / Axis | Capacitive |
| P-363 | PicoCube high-precision system for AFM, SPM, nanomanipulation; 50 picometer resolution. |
XY, XYZ | 5 / Axis | Capacitive |
| P-541 P-542 |
Low profile XY scanning stage 80 x 80 mm aperture. |
XY | to 200 in XY | Capacitive |
| P-733 | XY piezo scanning stage 50 x 50 mm aperture, vacuum versions available. |
XY | 100 x 100 | Capacitive |
| P-733.2DD / P-733.3DD |
High-speed scanning stage, XY and XYZ versions, ideal for tasks like scanning microscopy. |
XY, XYZ | 30 x 30 (x10) | Capacitive |
| P-734 | PInano Z Scanner, Low-Profile, Low-Cost, Nanopositioning System for Super Resolution Microscopy | Z | 100, 200 | Piezo Resistive |
| P-517 - P-527 |
Multi-axis stage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. |
XY, XYZ, XYθz |
to 200 in XY, 10 in Z, to 2 mrad |
Capacitive |
| P-561.3DD | PIMars XYZ scanning stages, faster, direct drive, excellent guidance, 66 x 66 mm clear aperture. |
XY, XYZ | 45 XY, 11 Z | Capacitive |
| P-561 - P-563 |
PIMars multi-axis stages; travel range to 300 x 300 x 300 m , 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. |
XY, XYZ | to 300 x 300 x 300 |
Capacitive |
| P-587 | 6-axis-Piezo Nanopositioner Stage. | XYZ, θxθyθz | up to 800 / 10 mrad |
Capacitive |
| P-518 - P-558 |
Z-axis and tip/tilt platforms clear aperture | Z, θxθy | to 200 in Z, 4 mrad |
Capacitive |
| Z-Axis and Tip/Tilt Platforms Tip/tilt platforms / mirrors see "Active Optics / Steering Mirrors" section |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-541.Z | Low-profile Z-stage, 80 x 80 mm aperture. | Z & Z, Tip/Tilt |
100 | Capacitive / SGS |
| P-518 - P-558 |
Z-axis and tip/tilt platforms 66 x 66 mm clear aperture |
Z & Z, Tip/Tilt |
to 200 in Z, 4 mrad |
Capacitive |
| P-620.Z - P-622.Z |
PIHera Z-axis nanopositioners, compact, very accurate, long travel range. |
Z | 50, 100, 250 | Capacitive |
| P-611.ZS, P-611.XZS |
Compact, low-cost Z and XY Piezo Nanopositioner Stages | Z, XZ | 100 | SGS |
| P-601 | Nanopositioning Piezo Z-stage / actuator, closed loop | Z | 500 | SGS- |
| Scanning (Microscopy) Stages with Clear Aperture |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-725 | PIFOC objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology |
Z | 100, 250, 400 | Capacitive |
| P-736 | Low-profile Z-stage, large aperture; Z-insert for slide scanner and K-frame | Z | 200 | PR/Capacitive |
| P-612 | Compact, low-cost, XY stage. 100 x 100 m travel, clear aperture. |
XY | 100 x 100 | SGS |
| P-545 | PI nano XY(Z) low profile piezo stage for superresolution microscopy, large aperture, includes advanced controller: 24-Bit, USB, TCP/IP, RS-232 and Analog Interface M-545 manual stage option | XY(Z) | to 200 x 200 x 200 m |
Piezo Resistive |
| P-517, P-527 |
Multi-axis stage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. |
XY, XYZ, XYθz | to 200 in XY, 20 in Z, to 4 mrad |
Capacitive |
| 6-Axis Parallel Kinematics Stages |
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| Models* | Description | Axes | Travel [m] | Sensor |
| P-587 | 6-axis-Piezo Nanopositioner Stage | XYZ, θxθyθz | up tp 800 / 10 mrad | Capacitive |
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* Ask about custom sizes, sensors or special designs. Capacitive and LVDT sensors are direct metrology devices. Capacitive sensors provide the highest accuracy, bandwidth and linearity. |
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Introduction to Piezoelectric Nanopositioning Actuators
Introduction to Piezoelectric Nanopositioning Actuators (Nano-Transducers) Piezo Transducers and Actuators Overview
PI's Piezoceramics Manufacturing Division (PI Ceramic )
Piezo Actuator Basics Piezo-University: Designing with Piezoelectrics
Piezo Motors / Stages.
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